发明授权
- 专利标题: Method of manufacturing layered chip package
- 专利标题(中): 分层芯片封装的制造方法
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申请号: US12805446申请日: 2010-07-30
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公开(公告)号: US07863095B2公开(公告)日: 2011-01-04
- 发明人: Yoshitaka Sasaki , Hiroyuki Ito , Tatsuya Harada , Nobuyuki Okuzawa , Satoru Sueki
- 申请人: Yoshitaka Sasaki , Hiroyuki Ito , Tatsuya Harada , Nobuyuki Okuzawa , Satoru Sueki
- 申请人地址: US CA Milpitas JP Tokyo
- 专利权人: Headway Technologies, Inc.,TDK Corporation
- 当前专利权人: Headway Technologies, Inc.,TDK Corporation
- 当前专利权人地址: US CA Milpitas JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A layered chip package includes a plurality of layer portions stacked, each layer portion including a semiconductor chip having a first surface with a device formed thereon and a second surface opposite thereto. The plurality of layer portions include at least a pair of layer portions disposed such that the first surfaces of the respective semiconductor chips face toward each other. A manufacturing method for the layered chip package includes the steps of: fabricating a layered substructure by stacking a plurality of substructures each including a plurality of layer portions corresponding to the plurality of layer portions of the layered chip package; and fabricating a plurality of layered chip packages by using the layered substructure. The step of fabricating the layered substructure includes: fabricating a first and a second pre-polishing substructure each having a first surface and a second surface; bonding the pre-polishing substructures to each other such that their respective first surfaces face toward each other; and forming a first and a second substructure by polishing the second surfaces.
公开/授权文献
- US20100304531A1 Method of manufacturing layered chip package 公开/授权日:2010-12-02
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