发明授权
- 专利标题: Lighting optical apparatus and sample inspection apparatus
- 专利标题(中): 照明光学仪器和样品检测仪器
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申请号: US12047759申请日: 2008-03-13
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公开(公告)号: US07863588B2公开(公告)日: 2011-01-04
- 发明人: Masatoshi Hirono
- 申请人: Masatoshi Hirono
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba,NEC Corporation
- 当前专利权人: Kabushiki Kaisha Toshiba,NEC Corporation
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-090423 20070330
- 主分类号: G01J1/00
- IPC分类号: G01J1/00
摘要:
A lighting optical apparatus using a deep ultraviolet light source that are easy to adjust due to a configuration with fewer components, has high illuminant and illuminant uniformity on an irradiated surface are provided. The apparatus has a deep ultraviolet light source from which deep ultraviolet rays are emitted, a first double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, a second double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, and a condenser lens.
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