发明授权
- 专利标题: Non-volatile memory device and method of fabricating the same
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US12285403申请日: 2008-10-03
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公开(公告)号: US07863672B2公开(公告)日: 2011-01-04
- 发明人: Young-gu Jin , Yoon-dong Park , Won-joo Kim , Suk-pil Kim , Seung-hoon Lee
- 申请人: Young-gu Jin , Yoon-dong Park , Won-joo Kim , Suk-pil Kim , Seung-hoon Lee
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2008-0005852 20080118
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L29/792 ; H01L21/336
摘要:
Provided are a non-volatile memory device that may expand to a stacked structure and may be more easily highly integrated and an economical method of fabricating the non-volatile memory device. The non-volatile memory device may include at least one semiconductor column. At least one first control gate electrode may be arranged on a first side of the at least one semiconductor column. At least one second control gate electrode may be arranged on a second side of the at least one semiconductor column. A first charge storage layer may be between the at least one first control gate electrode and the at least one semiconductor column. A second charge storage layer may be between the at least one second control gate electrode and the at least one semiconductor column.
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