发明授权
US07868358B2 Coiled circuit device with active circuitry and methods for making the same
失效
具有有源电路的线圈电路器件及其制造方法
- 专利标题: Coiled circuit device with active circuitry and methods for making the same
- 专利标题(中): 具有有源电路的线圈电路器件及其制造方法
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申请号: US11653964申请日: 2007-01-17
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公开(公告)号: US07868358B2公开(公告)日: 2011-01-11
- 发明人: Joseph Smith , Harvey C. Nathanson , Robert S. Howell , Christopher F. Kirby , Garrett A. Storaska
- 申请人: Joseph Smith , Harvey C. Nathanson , Robert S. Howell , Christopher F. Kirby , Garrett A. Storaska
- 申请人地址: US CA Los Angeles
- 专利权人: Northrop Grumman Systems Corporation
- 当前专利权人: Northrop Grumman Systems Corporation
- 当前专利权人地址: US CA Los Angeles
- 代理机构: Andrews Kurth LLP
- 主分类号: H01L27/10
- IPC分类号: H01L27/10
摘要:
A device includes a coiling layer, a circuit device layer and active microelectronic circuitry fabricated on the circuit device layer. The coiling layer is formed onto a surface of and coupled to the circuit device layer. The coiling layer having intrinsic stresses which cause coiling of the coiling layer and the circuit device layer including the microelectronic circuitry as the circuit device layer is released from an underlying substrate. A coiled circuit device is formed.
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