发明授权
- 专利标题: Method for fabricating waveguides
- 专利标题(中): 制造波导的方法
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申请号: US10867591申请日: 2004-06-14
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公开(公告)号: US07871469B2公开(公告)日: 2011-01-18
- 发明人: Dan Maydan , Arkadii V. Samoilov
- 申请人: Dan Maydan , Arkadii V. Samoilov
- 代理机构: Moser IP Law Group
- 主分类号: C30B21/02
- IPC分类号: C30B21/02
摘要:
A method of forming a planar waveguide structure, comprising forming a first graded layer on a substrate, wherein the first graded layer comprises a first and a second optical material, wherein the concentration of the first optical material increases with the height of the first graded layer; forming a second graded layer on the first graded layer, the second graded layer comprising the first and second optical materials wherein the concentration of the first optical material decreases with the height of the second graded layer. The method further including forming a uniform layer on the first graded layer, the uniform layer containing first and second optical materials wherein the first optical material concentration is constant.
公开/授权文献
- US20040237883A1 Method for fabricating waveguides 公开/授权日:2004-12-02
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