发明授权
US07871502B2 Method for manufacturing chalcopyrite thin-film solar cell 有权
制造黄铜矿薄膜太阳能电池的方法

  • 专利标题: Method for manufacturing chalcopyrite thin-film solar cell
  • 专利标题(中): 制造黄铜矿薄膜太阳能电池的方法
  • 申请号: US11568776
    申请日: 2005-04-12
  • 公开(公告)号: US07871502B2
    公开(公告)日: 2011-01-18
  • 发明人: Satoshi Aoki
  • 申请人: Satoshi Aoki
  • 申请人地址: JP Tokyo
  • 专利权人: Honda Motor Co., Ltd.
  • 当前专利权人: Honda Motor Co., Ltd.
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Rankin, Hill & Clark LLP
  • 优先权: JP2004-140703 20040511
  • 国际申请: PCT/JP2005/007098 WO 20050412
  • 国际公布: WO2005/109525 WO 20051117
  • 主分类号: C23C14/34
  • IPC分类号: C23C14/34 H01L25/00
Method for manufacturing chalcopyrite thin-film solar cell
摘要:
A method for fabricating a chalcopyrite-type thin film solar cell includes a first step of forming onto a Mo electrode layer 2 a precursor including an In metal layer and a Cu—Ga alloy layer by sputtering, a second step of attaching an alkali-metal solution onto the precursor, a selenization step of subjecting the substrate 1 which has undergone both the first and the second steps to a selenization treatment, and a transparent electrode forming step of depositing an optically transparent conductive layer. As the alkali-metal solution, an aqueous solution of an alkali metal compound, such as sodium tetraborate, sodium sulfide, and sodium aluminum sulfate, can be used.
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