发明授权
- 专利标题： Electrostatic lens assembly
- 专利标题（中）： 静电透镜组件
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申请号： US12181171申请日： 2008-07-28
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公开(公告)号： US07872239B2公开(公告)日： 2011-01-18
- 发明人: Pavel Adamec , Carlo Salvesen , Ivo Liska
- 申请人： Pavel Adamec , Carlo Salvesen , Ivo Liska
- 申请人地址： DE Heimstetten
- 专利权人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 当前专利权人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 当前专利权人地址： DE Heimstetten
- 代理机构： Patterson & Sheridan, L.L.P.
- 优先权： EP07014813 20070727
- 主分类号： H01J37/28
- IPC分类号： H01J37/28 ; H01J37/244 ; G01R31/305
摘要：
A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
公开/授权文献
- US20090026384A1 ELECTROSTATIC LENS ASSEMBLY 公开/授权日：2009-01-29
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