发明授权
- 专利标题: Organic thin film transistor array and method of manufacturing the same
- 专利标题(中): 有机薄膜晶体管阵列及其制造方法
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申请号: US12128993申请日: 2008-05-29
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公开(公告)号: US07872257B2公开(公告)日: 2011-01-18
- 发明人: Tomihiro Hashizume , Yuji Suwa , Masaaki Fujimori , Tadashi Arai , Takeo Shiba
- 申请人: Tomihiro Hashizume , Yuji Suwa , Masaaki Fujimori , Tadashi Arai , Takeo Shiba
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2007-160862 20070619
- 主分类号: H01L51/30
- IPC分类号: H01L51/30 ; H01L21/70
摘要:
An n-type TFT and a p-type TFT are realized by selectively changing only a cover coat without changing a TFT material using an equation for applying the magnitude of a difference in the Fermi energy between an interface of semiconductor and an electrode and between an interface of semiconductor and insulator. At this time, in order to configure a predetermined circuit, the process is performed, as a source electrode and a drain electrode of the p-type TFT and a source electrode and a drain electrode of the n-type TFT being connected all, respectively, and an unnecessary interconnection is cut by irradiating light using a scanning laser exposure apparatus or the like.
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