发明授权
US07872402B2 Perovskite-oxide laminates, and piezoelectric devices, and liquid discharge devices containing the same 有权
钙钛矿型氧化物层叠体及压电元件,以及含有它们的液体排出装置

Perovskite-oxide laminates, and piezoelectric devices, and liquid discharge devices containing the same
摘要:
A perovskite-oxide lamination constituted by a substrate and one or tore first films of a first oxide of a perovskite type and one or more second films of a second oxide which are alternately formed over the substrate. The first oxide has a composition expressed as ABO3, the second oxide has a composition expressed as CDO3, each of A and C represents one or more A-site elements which are one or more metal elements, each of B and D represents one or more B-site elements which are one or more metal elements, O represents oxygen, and the second oxide is unable to be formed to have a perovskite crystal structure at normal pressure without a thickness limitation. The one or more first films and the one or more second films may contain inevitable impurities.
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