发明授权
- 专利标题: Optical position measuring arrangement
- 专利标题(中): 光学位置测量装置
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申请号: US12321642申请日: 2009-01-23
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公开(公告)号: US07872762B2公开(公告)日: 2011-01-18
- 发明人: Michael Hermann , Karsten Sändig
- 申请人: Michael Hermann , Karsten Sändig
- 申请人地址: DE Traunreut
- 专利权人: Dr. Johannes Heidenhain GmbH
- 当前专利权人: Dr. Johannes Heidenhain GmbH
- 当前专利权人地址: DE Traunreut
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: DE102008007319 20080202
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B9/02 ; G01D5/36
摘要:
An arrangement for generating phase-shifted incremental signals characterizing relative positions of two objects moving with respect to each other along a measuring direction. The measuring arrangement includes a light source emitting bundles of beams, a measurement grating, a plurality of optional gratings and a scanning unit. The scanning unit includes a grating in a scanning plane, wherein the grating includes a plurality of blocks arranged periodically along the measuring direction with a grating periodicity equaling a fringe pattern periodicity, and each block includes n grating sections arranged along the measuring direction, each of the n grating sections having a periodic grating structure, deflecting the bundles of beams propagated through each of the n grating sections in several different spatial directions. The scanning unit further includes a plurality of detector elements arranged downstream of the grating, wherein the detector elements are arranged in the spatial directions in the detector plane, and wherein the detector plane is located where the bundles of beams coming from the grating are spatially separated. The fringe pattern is formed in the scanning plane by the bundles of beams emitted by the light source interacting with the measurement grating and the optional gratings.
公开/授权文献
- US20090195792A1 Optical position measuring arrangement 公开/授权日:2009-08-06
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