发明授权
US07876021B2 Surface acoustic wave device including an IDT defined by a metal filled in grooves in a piezoelectric substrate
有权
表面声波装置包括由填充在压电基板中的凹槽中的金属限定的IDT
- 专利标题： Surface acoustic wave device including an IDT defined by a metal filled in grooves in a piezoelectric substrate
- 专利标题（中）： 表面声波装置包括由填充在压电基板中的凹槽中的金属限定的IDT
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申请号： US12629924申请日： 2009-12-03
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公开(公告)号： US07876021B2公开(公告)日： 2011-01-25
- 发明人: Michio Kadota , Takeshi Nakao
- 申请人： Michio Kadota , Takeshi Nakao
- 申请人地址： JP Kyoto
- 专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人地址： JP Kyoto
- 代理机构： Keating & Bennett, LLP
- 优先权： JP2007-150664 20070606
- 主分类号： H01L41/04
- IPC分类号： H01L41/04
摘要：
A surface acoustic wave device includes a LiTaO3 substrate, and an IDT having a high reflection coefficient, which has a relatively high electromechanical coupling coefficient k2, and which can obtain superior resonance characteristics and/or filter characteristics. In a surface acoustic wave device in which a plurality of grooves is provided in an upper surface of a LiTaO3 substrate and an IDT having a plurality of electrode fingers made of a metal filled in the plurality of grooves, the following equation is satisfied:(ρ3×C44)1/2>1.95×1011, where ρ represents the density of the metal defining the IDT, and C44 represents the stiffness thereof.
公开/授权文献
- US20100072856A1 SURFACE ACOUSTIC WAVE DEVICE 公开/授权日：2010-03-25
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