发明授权
- 专利标题: Load lock and method for transferring objects
- 专利标题(中): 加载锁和传送对象的方法
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申请号: US12068072申请日: 2008-02-01
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公开(公告)号: US07878755B2公开(公告)日: 2011-02-01
- 发明人: Albert Jan Hendrik Klomp , Jan Frederik Hoogkamp , Josephus Cornelius Johannes Antonius Vugts , Robert Gordon Livesey , Johannes Hendrikus Gertrudis Franssen
- 申请人: Albert Jan Hendrik Klomp , Jan Frederik Hoogkamp , Josephus Cornelius Johannes Antonius Vugts , Robert Gordon Livesey , Johannes Hendrikus Gertrudis Franssen
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 优先权: EP03075703 20030311
- 主分类号: B65G25/00
- IPC分类号: B65G25/00
摘要:
A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.
公开/授权文献
- US20080138177A1 Load lock and method for transferring objects 公开/授权日:2008-06-12