Invention Grant
- Patent Title: Micro-electro-mechanical transducer having a surface plate
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Application No.: US12568225Application Date: 2009-09-28
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Publication No.: US07880565B2Publication Date: 2011-02-01
- Inventor: Yongli Huang
- Applicant: Yongli Huang
- Applicant Address: US CA San Jose
- Assignee: Kolo Technologies, Inc.
- Current Assignee: Kolo Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Lee & Hayes, PLLC
- Main IPC: H03H7/00
- IPC: H03H7/00 ; H03H7/01

Abstract:
A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base, a spring layer placed over the base, and a mass layer connected to the spring layer through a spring-mass connector. The base includes a first electrode. The spring layer or the mass layer includes a second electrode. The base and the spring layer form a gap therebetween and are connected through a spring anchor. The mass layer provides a substantially independent spring mass contribution to the spring model without affecting the equivalent spring constant. The mass layer also functions as a surface plate interfacing with the medium to improve transducing performance. Fabrication methods to make the same are also disclosed.
Public/Granted literature
- US20100013574A1 Micro-Electro-Mechanical Transducer Having a Surface Plate Public/Granted day:2010-01-21
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