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US07880894B2 Vibration detection device and vibration detector 失效
振动检测装置和振动检测器

Vibration detection device and vibration detector
摘要:
A vibration detection device that includes a light source that emits a laser beam; an interferometer, which includes two vibrating bodies that are capable of reflecting the laser beam, that splits the laser beam to cause interference patterns; and a detector that detects vibrations on the basis of the interference patterns.
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