发明授权
US07883633B2 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
有权
在磁场增强等离子体反应器中形成磁场的方法
- 专利标题: Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
- 专利标题(中): 在磁场增强等离子体反应器中形成磁场的方法
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申请号: US11612129申请日: 2006-12-18
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公开(公告)号: US07883633B2公开(公告)日: 2011-02-08
- 发明人: Roger A. Lindley , Scott A. Hogenson , Daniel J. Hoffman
- 申请人: Roger A. Lindley , Scott A. Hogenson , Daniel J. Hoffman
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Moser IP Law Group
- 主分类号: C23F1/00
- IPC分类号: C23F1/00
摘要:
Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
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