发明授权
US07883633B2 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor 有权
在磁场增强等离子体反应器中形成磁场的方法

Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
摘要:
Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
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