发明授权
US07883949B2 Methods of forming silicon carbide switching devices including P-type channels
有权
形成包括P型通道的碳化硅切换装置的方法
- 专利标题: Methods of forming silicon carbide switching devices including P-type channels
- 专利标题(中): 形成包括P型通道的碳化硅切换装置的方法
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申请号: US11740687申请日: 2007-04-26
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公开(公告)号: US07883949B2公开(公告)日: 2011-02-08
- 发明人: Mrinal Kanti Das , Qingchun Zhang , Sei-Hyung Ryu
- 申请人: Mrinal Kanti Das , Qingchun Zhang , Sei-Hyung Ryu
- 申请人地址: US NC Durham
- 专利权人: Cree, Inc
- 当前专利权人: Cree, Inc
- 当前专利权人地址: US NC Durham
- 代理机构: Myers, Bigel, Sibley & Sajovec, P.A.
- 主分类号: H01L21/337
- IPC分类号: H01L21/337
摘要:
Methods of forming a p-channel MOS device in silicon carbide include forming an n-type well in a silicon carbide layer, and implanting p-type dopant ions to form a p-type region in the n-type well at a surface of the silicon carbide layer and at least partially defining a channel region in the n-type well adjacent the p-type region. A threshold adjustment region is formed in the channel region. The implanted ions are annealed in an inert atmosphere at a temperature greater than 1650° C. A gate oxide layer is formed on the channel region, and a gate is formed on the gate oxide layer. A silicon carbide-based transistor includes a silicon carbide layer, an n-type well in the silicon carbide layer, and a p-type region in the n-type well at a surface of the silicon carbide layer and at least partially defining a channel region in the n-type well adjacent the p-type region. A threshold adjustment region is in the channel region and includes p-type dopants at a dopant concentration of about 1×1016 cm−3 to about 5×1018 cm−3. The transistor further includes a gate oxide layer on the channel region, and a gate on the gate oxide layer. The transistor may exhibit a hole mobility in the channel region in excess of 5 cm2/V-s at a gate voltage of −25V.