Invention Grant
US07888762B2 Infrared detector and fabricating method of infrared detector 失效
红外探测器和红外探测器的制造方法

Infrared detector and fabricating method of infrared detector
Abstract:
There is provided an infrared detector including: a silicon substrate provided with a concave portion; an infrared receiver having a polysilicon layer; and a beam that supports the infrared receiver above the concave portion, and extends along a side of the infrared receiver from the infrared receiver to connect with the silicon substrate, the beam having at least two bent portions, wherein at least one of the bent portions of the beam is disposed at a position on a side opposite to the concave portion with the polysilicon layer as a reference point.
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