发明授权
- 专利标题: Method of manufacturing a thin-film magnetic head, thin-film magnetic head manufacturing apparatus, and thin-film magnetic head manufacturing system
- 专利标题(中): 薄膜磁头制造方法,薄膜磁头制造装置以及薄膜磁头制造系统
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申请号: US11683611申请日: 2007-03-08
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公开(公告)号: US07892442B2公开(公告)日: 2011-02-22
- 发明人: Hiroo Sawada , Jun Shouji , Mitsuhiro Kitao , Eiji Yamada
- 申请人: Hiroo Sawada , Jun Shouji , Mitsuhiro Kitao , Eiji Yamada
- 申请人地址: JP Tokyo
- 专利权人: TDK Corporation
- 当前专利权人: TDK Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method of manufacturing a thin-film magnetic head works a part to be worked to a target length by carrying out an etching process on an object to be worked using an etching apparatus. The method carries out a measuring process that measures a length before working of a part to be worked using a measuring apparatus and a calculation process that calculates the processing time of the etching process required to work the part to be worked from the length before working to the target length based on a first calculation result correcting parameter obtained in advance corresponding to the measuring apparatus, a second calculation result correcting parameter obtained in advance corresponding to a position of the part to be worked, a third calculation result correcting parameter obtained in advance corresponding to a value of a current supplied to an electrode of the etching apparatus during the etching process, a fourth calculation result correcting parameter obtained in advance corresponding to a total usage time of the electrode, the length before working, and the target length. The etching process is carried out on the object to be worked for the calculated processing time.
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