发明授权
US07895764B2 Measuring instrument 有权
测量仪器

Measuring instrument
摘要:
A measuring instrument includes: an XY stage on which an object to be measured is placed; a probe holder having a plurality of probes; and a relative moving mechanism that relatively moves the XY stage and the probe holder. The probe holder is provided with a probe selection mechanism that has two guide rails obliquely arranged and advances and retracts at least two of the probes to be selectively positioned at and away from a probe selection position.
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