发明授权
- 专利标题: Measuring instrument
- 专利标题(中): 测量仪器
-
申请号: US12379795申请日: 2009-03-02
-
公开(公告)号: US07895764B2公开(公告)日: 2011-03-01
- 发明人: Kazuhiro Ishizu , Takeshi Yamamoto
- 申请人: Kazuhiro Ishizu , Takeshi Yamamoto
- 申请人地址: JP Kawasaki-shi
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2008-060695 20080311
- 主分类号: G01B5/004
- IPC分类号: G01B5/004
摘要:
A measuring instrument includes: an XY stage on which an object to be measured is placed; a probe holder having a plurality of probes; and a relative moving mechanism that relatively moves the XY stage and the probe holder. The probe holder is provided with a probe selection mechanism that has two guide rails obliquely arranged and advances and retracts at least two of the probes to be selectively positioned at and away from a probe selection position.
公开/授权文献
- US20090229138A1 Measuring instrument 公开/授权日:2009-09-17
信息查询