发明授权
US07896625B2 Vacuum pumping system and method of operating a vacuum pumping arrangement
有权
真空泵送系统和操作真空泵送装置的方法
- 专利标题： Vacuum pumping system and method of operating a vacuum pumping arrangement
- 专利标题（中）： 真空泵送系统和操作真空泵送装置的方法
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申请号： US10536775申请日： 2003-12-09
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公开(公告)号： US07896625B2公开(公告)日： 2011-03-01
- 发明人: Nigel Paul Schofield
- 申请人： Nigel Paul Schofield
- 申请人地址： GB Crawley, West Sussex
- 专利权人： Edwards Limited
- 当前专利权人： Edwards Limited
- 当前专利权人地址： GB Crawley, West Sussex
- 优先权： GB0229353.8 20021217
- 国际申请： PCT/GB03/05380 WO 20031209
- 国际公布： WO2004/055377 WO 20040701
- 主分类号： F04B35/04
- IPC分类号： F04B35/04
摘要：
A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising a turbomolecular pumping mechanism; and a backing pumping mechanism. The drive shaft drives said molecular pumping mechanism and said backing pumping mechanism. The system also comprises an evacuation mechanism, such as a load lock pump, for evacuating at least, said turbomolecular pumping mechanism.
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