发明授权
- 专利标题: Removable liners for charged particle beam systems
- 专利标题(中): 用于带电粒子束系统的可拆卸衬套
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申请号: US12167271申请日: 2008-07-03
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公开(公告)号: US07897939B2公开(公告)日: 2011-03-01
- 发明人: Alan Michael Chandler , Tushar Desai , Ellis Craig Hayford , Nicholas Mone, Jr. , James Spiros Nakos
- 申请人: Alan Michael Chandler , Tushar Desai , Ellis Craig Hayford , Nicholas Mone, Jr. , James Spiros Nakos
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 Anthony J. Canale
- 主分类号: G21K5/00
- IPC分类号: G21K5/00
摘要:
A method of improving the performance of charged beam apparatus. The method including: providing the apparatus, the apparatus comprising: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; and a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and positioning one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
公开/授权文献
- US20080258081A1 REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS 公开/授权日:2008-10-23