发明授权
- 专利标题: Automatic dynamic baseline creation and adjustment
- 专利标题(中): 自动动态基线创建和调整
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申请号: US11536577申请日: 2006-09-28
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公开(公告)号: US07899627B2公开(公告)日: 2011-03-01
- 发明人: Chung-Ho Huang , Jackie Seto , Nicolas Bright
- 申请人: Chung-Ho Huang , Jackie Seto , Nicolas Bright
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: IPSG, P.C.
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; H01L21/00
摘要:
In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline. The method moreover includes including the first signal data in a recalculation of the baseline if the first signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.
公开/授权文献
- US20080079918A1 AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT 公开/授权日:2008-04-03
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