发明授权
US07899627B2 Automatic dynamic baseline creation and adjustment 有权
自动动态基线创建和调整

Automatic dynamic baseline creation and adjustment
摘要:
In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline. The method moreover includes including the first signal data in a recalculation of the baseline if the first signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.
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