Invention Grant
- Patent Title: Semiconductor substrates and manufacturing methods of the same
- Patent Title (中): 半导体衬底及其制造方法相同
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Application No.: US12219360Application Date: 2008-07-21
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Publication No.: US07902007B2Publication Date: 2011-03-08
- Inventor: Won-joo Kim , Tae-hee Lee , Dae-kil Cha , Yoon-dong Park
- Applicant: Won-joo Kim , Tae-hee Lee , Dae-kil Cha , Yoon-dong Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2008-0017419 20080226
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
Semiconductor substrates and methods of manufacturing the same are provided. The semiconductor substrates include a substrate region, an insulation region and a floating body region. The insulation region is disposed on the substrate region. The floating body region is separated from the substrate region by the insulation region and is disposed on the insulation region. The substrate region and the floating body region are formed of materials having identical characteristics. The method of manufacturing the semiconductor substrate including forming at least one floating body pattern by etching a bulk substrate, separating the bulk substrate into a substrate region and a floating body region by etching a lower middle portion of the floating body pattern, and filling an insulating material between the floating body region and the substrate region.
Public/Granted literature
- US20090212364A1 Semiconductor substrates and manufacturing methods of the same Public/Granted day:2009-08-27
Information query
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