发明授权
- 专利标题: Boundary acoustic wave device and method for manufacturing the same
- 专利标题(中): 边界声波装置及其制造方法
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申请号: US12412446申请日: 2009-03-27
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公开(公告)号: US07902717B2公开(公告)日: 2011-03-08
- 发明人: Shin Saijou , Toshiyuki Fuyutsume
- 申请人: Shin Saijou , Toshiyuki Fuyutsume
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2006-267805 20060929
- 主分类号: H01L41/083
- IPC分类号: H01L41/083
摘要:
A boundary acoustic wave device includes a piezoelectric substance, a dielectric substance laminated on the piezoelectric substance, and an electrode film disposed at a boundary between the piezoelectric substance and a dielectric substance, the device utilizing a boundary acoustic wave propagating along the boundary, wherein the electrode film is any one Au alloy electrode film of an Au alloy electrode film including Cu at a ratio of about 0.01% to about 4.8% by weight, an Au alloy electrode film including Pd at a ratio of about 0.01% to about 6.8% by weight, and an Au alloy electrode film including Ni at a ratio of about 0.01% to about 3.5% by weight.
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