发明授权
- 专利标题: Multi-beam optical probe and system for dimensional measurement
- 专利标题(中): 多光束光学探针和尺寸测量系统
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申请号: US12229205申请日: 2008-08-20
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公开(公告)号: US07903245B2公开(公告)日: 2011-03-08
- 发明人: Marc Miousset , Jacques Fourot
- 申请人: Marc Miousset , Jacques Fourot
- 代理机构: Muirhead and Saturnelli, LLC
- 优先权: CA2597891 20070820
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A multi-beam optical probe according to illustrative embodiments of the present invention generally reduce the limitations, difficulties and disadvantages of the conventional measurement devices and techniques by providing a non-contact multi-beam optical probe apparatus and system for the dimensional measurement of objects. The narrow elongated probe provides at least two orthogonal, divergent or parallel laser beams, the reflection of each beam on the object being simultaneously detectable without moving the probe.
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