发明授权
- 专利标题: High contrast grating light valve
- 专利标题(中): 高对比度光栅光阀
-
申请号: US10050994申请日: 2002-01-22
-
公开(公告)号: US07903337B1公开(公告)日: 2011-03-08
- 发明人: Jim Hunter , Chris Gudeman , David T. Amm , Akira Tomita
- 申请人: Jim Hunter , Chris Gudeman , David T. Amm , Akira Tomita
- 申请人地址: US CA Sunnyvale
- 专利权人: Silicon Light Machines
- 当前专利权人: Silicon Light Machines
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Berenato & White, LLC
- 代理商 Steven B. Kelber
- 主分类号: G02B5/18
- IPC分类号: G02B5/18
摘要:
A grating light valve is provided with a plurality of spaced reflective ribbons, spatially arranged over a semiconductor substrate, the ribbons and substrate being provided with reflective surfaces. The grating light valve is configured to optimize the conditions for constructive and destructive interference with an incident light source having a given wavelength. In a preferred embodiment, one set of ribbons is moveable with respect to the substrate and the second set of ribbons. The substrate is typically provided with a protective layer, which may be thermally grown silicon dioxide or other dielectric. A conductive trace is provided on the dielectric layer and grounded through the dielectric layer to the substrate, comprising a conductive trace for easy release of charge otherwise trapped on or at the dielectric layer.
信息查询