Invention Grant
- Patent Title: Nitride semiconductor light-emitting device and method for fabrication thereof
- Patent Title (中): 氮化物半导体发光器件及其制造方法
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Application No.: US10902481Application Date: 2004-07-30
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Publication No.: US07903708B2Publication Date: 2011-03-08
- Inventor: Takeshi Kamikawa , Eiji Yamada , Masahiro Araki , Yoshika Kaneko
- Applicant: Takeshi Kamikawa , Eiji Yamada , Masahiro Araki , Yoshika Kaneko
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Morrison & Foerster LLP
- Priority: JP2003-204262 20030731; JP2004-183163 20040622
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
A nitride semiconductor laser device uses a substrate with low defect density, contains reduced strains inside a nitride semiconductor film, and thus offers a satisfactorily long useful life. On a GaN substrate (10) with a defect density as low as 106 cm−2 or less, a stripe-shaped depressed portion (16) is formed by etching. On this substrate (10), a nitride semiconductor film (11) is grown, and a laser stripe (12) is formed off the area right above the depressed portion (16). With this structure, the laser stripe (12) is free from strains, and the semiconductor laser device offers a long useful life. Moreover, the nitride semiconductor film (11) develops reduced cracks, resulting in a greatly increased yield rate.
Public/Granted literature
- US20050025204A1 Nitride semiconductor light-emitting device and method for fabrication thereof Public/Granted day:2005-02-03
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