Invention Grant
- Patent Title: Scanning probe microscope apparatus
- Patent Title (中): 扫描探针显微镜装置
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Application No.: US12375683Application Date: 2007-07-19
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Publication No.: US07904966B2Publication Date: 2011-03-08
- Inventor: Dai Kobayashi , Shuhei Nishida , Hideki Kawakatsu
- Applicant: Dai Kobayashi , Shuhei Nishida , Hideki Kawakatsu
- Applicant Address: JP Kawaguchi-shi
- Assignee: Japan Science and Technology Agency
- Current Assignee: Japan Science and Technology Agency
- Current Assignee Address: JP Kawaguchi-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-207297 20060731
- International Application: PCT/JP2007/064237 WO 20070719
- International Announcement: WO2008/015916 WO 20080207
- Main IPC: G01Q60/32
- IPC: G01Q60/32

Abstract:
There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low.A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4). And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.
Public/Granted literature
- US20090261249A1 SCANNING PROBE MICROSCOPE APPARATUS Public/Granted day:2009-10-22
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