发明授权
- 专利标题: Apparatus and method of transporting and loading probe devices of a metrology instrument
- 专利标题(中): 运输和加载计量仪器探头装置的装置和方法
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申请号: US12058996申请日: 2008-03-31
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公开(公告)号: US07908909B2公开(公告)日: 2011-03-22
- 发明人: Adam J. Feinstein , Matthew R. Wilson
- 申请人: Adam J. Feinstein , Matthew R. Wilson
- 申请人地址: US AZ Tucson
- 专利权人: Bruker Nano, Inc.
- 当前专利权人: Bruker Nano, Inc.
- 当前专利权人地址: US AZ Tucson
- 代理机构: Boyle Fredrickson, S.C.
- 主分类号: G01D11/24
- IPC分类号: G01D11/24
摘要:
The preferred embodiments are directed to a probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.
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