发明授权
US07908909B2 Apparatus and method of transporting and loading probe devices of a metrology instrument 有权
运输和加载计量仪器探头装置的装置和方法

Apparatus and method of transporting and loading probe devices of a metrology instrument
摘要:
The preferred embodiments are directed to a probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.
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