Invention Grant
- Patent Title: Method of forming a film on a substrate
- Patent Title (中): 在基材上形成膜的方法
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Application No.: US11251843Application Date: 2005-10-18
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Publication No.: US07910167B2Publication Date: 2011-03-22
- Inventor: Osamu Kasuga
- Applicant: Osamu Kasuga
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2004-341593 20041126
- Main IPC: B05D3/06
- IPC: B05D3/06

Abstract:
A film-forming method of forming a film on a substrate includes performing a surface-improving treatment on the substrate, determining whether a predetermined amount of time has passed since the surface-improving treatment has been performed on the substrate, applying a film-forming solution to the substrate when it is determined that the predetermined amount of time has not passed, and repeating the surface-improving treatment on the substrate when it is determined that the predetermined amount of time has passed.
Public/Granted literature
- US20060115581A1 Film-forming apparatus and film-forming method Public/Granted day:2006-06-01
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