Invention Grant
- Patent Title: Ferroelectric capacitor having three-dimensional structure, nonvolatile memory device having the same and method of fabricating the same
- Patent Title (中): 具有三维结构的铁电电容器,具有相同的非易失性存储器件及其制造方法
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Application No.: US11515024Application Date: 2006-09-05
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Publication No.: US07910967B2Publication Date: 2011-03-22
- Inventor: Sang-min Shin , Young-soo Park , June-mo Koo , Byoung-jae Bae , I-hun Song , Suk-pil Kim
- Applicant: Sang-min Shin , Young-soo Park , June-mo Koo , Byoung-jae Bae , I-hun Song , Suk-pil Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0082439 20050905
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/112 ; H01L23/48

Abstract:
A ferroelectric capacitor having a three-dimensional structure, a nonvolatile memory device having the same, and a method of fabricating the same are provided. The ferroelectric capacitor may include a trench-type lower electrode, at least one layer formed around the lower electrode, a ferroelectric layer (PZT layer) formed on the lower electrode and the at least one layer and an upper electrode formed on the ferroelectric layer. The at least one layer may be at least one insulating interlayer and the at least one layer may also be at least one diffusion barrier layer. The at least one layer may be formed of an insulating material excluding SiO2 or may have a perovskite crystal structure excluding Pb.
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