发明授权
- 专利标题: Directionally controlled growth of nanowhiskers
- 专利标题(中): 纳米晶须的定向控制生长
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申请号: US12003988申请日: 2008-01-04
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公开(公告)号: US07911035B2公开(公告)日: 2011-03-22
- 发明人: Werner Seifert , Lars Ivar Samuelson , Björn Jonas Ohlsson , Lars Magnus Borgström
- 申请人: Werner Seifert , Lars Ivar Samuelson , Björn Jonas Ohlsson , Lars Magnus Borgström
- 申请人地址: SE Lund
- 专利权人: QuNano AB
- 当前专利权人: QuNano AB
- 当前专利权人地址: SE Lund
- 代理机构: The Marbury Law Group, PLLC
- 主分类号: H01L29/20
- IPC分类号: H01L29/20
摘要:
Nanowhiskers are grown in a non-preferential growth direction by regulation of nucleation conditions to inhibit growth in a preferential direction. In a preferred implementation, III-V semiconductor nanowhiskers are grown on an (001) III-V semiconductor substrate surface by effectively inhibiting growth in the preferential B direction. As one example, InP nano-wires were grown by metal-organic vapor phase epitaxy directly on (001) InP substrates. Characterization by scanning electron microscopy and transmission electron microscopy revealed wires with nearly square cross sections and a perfect zincblende crystalline structure that is free of stacking faults.
公开/授权文献
- US20080142926A1 Directionally controlled growth of nanowhiskers 公开/授权日:2008-06-19
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