Invention Grant
- Patent Title: Evacuation of a load lock enclosure
- Patent Title (中): 疏散装载锁定外壳
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Application No.: US11660339Application Date: 2005-08-17
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Publication No.: US07914265B2Publication Date: 2011-03-29
- Inventor: Stuart Charles Coles , Michael Andrew Galtry , David Alan Turrell , Patrick Brian Clayton
- Applicant: Stuart Charles Coles , Michael Andrew Galtry , David Alan Turrell , Patrick Brian Clayton
- Applicant Address: GB Crawley, West Sussex
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Crawley, West Sussex
- Priority: GB0418771.2 20040820
- International Application: PCT/GB2005/003221 WO 20050817
- International Announcement: WO2006/018639 WO 20060223
- Main IPC: F04B3/00
- IPC: F04B3/00

Abstract:
A system for evacuating an enclosure is provided. The system includes a first vacuum pump having an inlet selectively connectable to an outlet from the enclosure. A second vacuum pump is also provided together with a conduit for connecting an exhaust of the first vacuum pump to an inlet of the second vacuum pump. An auxiliary chamber is provided, this chamber being selectively connectable to the conduit such that, in a first state, gas can be drawn from the auxiliary chamber by the second vacuum pump in isolation from the enclosure, and, in a second state, gas can be drawn from the enclosure to the auxiliary chamber through the first vacuum pump.
Public/Granted literature
- US20080089793A1 Evacuation of a Load Lock Enclosure Public/Granted day:2008-04-17
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