Invention Grant
- Patent Title: Method for fabricating a flat panel display
- Patent Title (中): 制造平板显示器的方法
-
Application No.: US12434032Application Date: 2009-05-01
-
Publication No.: US07915103B2Publication Date: 2011-03-29
- Inventor: Chun-Yen Liu , Chang-Ho Tseng
- Applicant: Chun-Yen Liu , Chang-Ho Tseng
- Applicant Address: TW
- Assignee: Chimei Innolux Corporation
- Current Assignee: Chimei Innolux Corporation
- Current Assignee Address: TW
- Agency: Thomas, Kayden, Horstemeyer & Risley, LLP
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L27/146

Abstract:
The method for fabricating a flat panel display includes performing a first crystallization process to re-crystallize an amorphous silicon layer on a glass substrate to make the amorphous silicon layer become a polysilicon layer, forming a patterned absorbing layer to cover an active area pattern of a driving TFT and to expose portions of the polysilicon layer, performing a second crystallization process to re-crystallization the exposed portions of the polysilicon layer so that the exposed portions of the polysilicon layer has a different grain structure from the grain structure of the driving TFT, removing the patterned absorbing layer, and removing portions of the polysilicon layer to form an active area of the driving TFT and an active area of a switching TFT area in the exposed portions of the polysilicon layer of each sub-pixel.
Public/Granted literature
- US20090215212A1 Method for Fabricating A Flat Panel Display Public/Granted day:2009-08-27
Information query
IPC分类: