发明授权
- 专利标题: Semiconductor inspection apparatus
- 专利标题(中): 半导体检测仪器
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申请号: US11482089申请日: 2006-07-07
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公开(公告)号: US07916926B2公开(公告)日: 2011-03-29
- 发明人: Hidemitsu Naya , Takuya Shirato , Akira Karakama
- 申请人: Hidemitsu Naya , Takuya Shirato , Akira Karakama
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Crowell & Moring LLP
- 优先权: JP2005-200668 20050708
- 主分类号: G09G5/00
- IPC分类号: G09G5/00
摘要:
An inspected image can be communicated without putting large load on a network. A remote console enables an operation screen and a moving image to be displayed and processed without color shifts. Information on the operation screen is not communicated as bitmap information, but event information such as a formation of a window and the moving of a mouse is communicated as information at a level of I parts of graphical user interface. Moreover, communication of the event information on the operation screen and communication of a moving image are separated. In addition, a method of compressing information on the operation screen and a method of compressing information on the moving image are separated. A necessary part of information on the moving image is selected and communicated depending on the state of the semiconductor inspection apparatus, an operation of an operator, and a pattern to be inspected.
公开/授权文献
- US20070024643A1 Semiconductor inspection apparatus 公开/授权日:2007-02-01
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