发明授权
US07916985B2 Integrated visible pilot beam for non-visible optical waveguide devices
有权
用于不可见光波导器件的集成可见导光束
- 专利标题： Integrated visible pilot beam for non-visible optical waveguide devices
- 专利标题（中）： 用于不可见光波导器件的集成可见导光束
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申请号： US11844797申请日： 2007-08-24
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公开(公告)号： US07916985B2公开(公告)日： 2011-03-29
- 发明人: David R. Peale
- 申请人： David R. Peale
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Luedeka, Neely & Graham, P.C.
- 主分类号： G02B6/32
- IPC分类号： G02B6/32 ; G02B6/26
摘要：
In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.
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