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发明授权
US07919141B2 Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles 有权
用于制备含F2气体的方法和设备，以及用于改变制品表面的工艺和设备

Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles
摘要：
The present invention provides processes and equipments for safely and easily preparing an F2-containing gas, as well as processes and equipments for surface modification using the F2-containing gas prepared.According to the present invention, a gas containing a fluoro compound that is easier to handle than F2 is supplied and the fluoro compound is excited and decomposed to convert it into F2 gas before surface modification and then used for surface modification. According to the present invention, there is no necessity of providing, storing and transporting a large amount of F2 gas in advance because a necessary amount of F2 gas is obtained immediately before surface modification.A process for preparing an F2-containing gas comprises the steps of exciting at least one fluoro compound in a fluoro compound-containing gas by conferring energy on the fluoro compound-containing gas under reduced pressure; and partially or completely converting the excited fluoro compound-containing gas containing the excited fluoro compound into F2 under normal pressure or overpressure.
摘要（中）：

本发明提供用于安全且容易地制备含F2气体的方法和设备，以及使用所制备的含F2气体进行表面改性的工艺和设备。 根据本发明，供给含有比F2更容易处理的氟化合物的气体，氟化合物在表面改性前被激发分解成F2气体，然后用于表面改性。 根据本发明，由于在表面改性前立即获得必要量的F2气体，所以不需要事先设置，存储和运送大量的F2气体。 制备含F2气体的方法包括以下步骤：通过在减压下赋予含氟化合物的气体来激发含氟化合物的气体中的至少一种氟化合物; 并在常压或超压下将含有激发的氟化合物的含氟化合物的含氟气体部分或完全转化为F2。

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