发明授权
- 专利标题: MRAM
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申请号: US12493612申请日: 2009-06-29
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公开(公告)号: US07919334B2公开(公告)日: 2011-04-05
- 发明人: Kor Seng Ang
- 申请人: Kor Seng Ang
- 申请人地址: SG Singapore
- 专利权人: Showa Denko HD Singapore Pte Ltd.
- 当前专利权人: Showa Denko HD Singapore Pte Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Sughrue Mion, PLLC
- 优先权: SG200805077-5 20080701
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Disclosed is a method to convert a low resistance cell in a MRAM device to a capacitive cell. The low resistance cell has a plurality of layers on a substrate. At least one layer remote from the substrate is sensitive to oxygen infusion. The method includes removing a cap layer of the cell and applying an oxygen barrier around the cell to expose at least a part of a surface of the at least one layer remote from the substrate. The at least one layer is oxidized. The oxygen barrier is removed.
公开/授权文献
- US20100003834A1 MRAM 公开/授权日:2010-01-07
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