发明授权
- 专利标题: Magnetic random access memory and method of manufacturing the same
- 专利标题(中): 磁性随机存取存储器及其制造方法
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申请号: US12605072申请日: 2009-10-23
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公开(公告)号: US07920412B2公开(公告)日: 2011-04-05
- 发明人: Keiji Hosotani , Yoshiaki Asao , Akihiro Nitayama
- 申请人: Keiji Hosotani , Yoshiaki Asao , Akihiro Nitayama
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2006-269334 20060929
- 主分类号: G11C11/00
- IPC分类号: G11C11/00
摘要:
A magnetic random access memory includes a first wiring, a second wiring formed above and spaced apart from the first wiring, a magnetoresistive effect element formed between the first wiring and the second wiring, formed in contact with an upper surface of the first wiring, and having a fixed layer, a recording layer, and a nonmagnetic layer formed between the fixed layer and the recording layer, a metal layer formed on the magnetoresistive effect element and integrated with the magnetoresistive effect element to form stacked layers, a first side insulating film formed on side surfaces of the metal layer, the magnetoresistive effect element, and the first wiring, a first contact formed in contact with a side surface of the first side insulating film, and a third wiring formed on the metal layer and the first contact to electrically connect the magnetoresistive effect element and the first contact.
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