发明授权
- 专利标题: Nanotip repair and characterization using field ion microscopy
- 专利标题(中): 纳米技术使用场离子显微镜修复和表征
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申请号: US12191855申请日: 2008-08-14
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公开(公告)号: US07921465B2公开(公告)日: 2011-04-05
- 发明人: Vladimir Ukraintsev
- 申请人: Vladimir Ukraintsev
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Wade J. Brady, III; Frederick J. Telecky, Jr
- 主分类号: G01Q40/00
- IPC分类号: G01Q40/00
摘要:
A system (100) for characterizing surfaces can include a nanotip microscope (104) in a first pressure envelope (102) at a first pressure with an electrically conductive nanotip (110) mounted thereon for characterizing a sample surface. The system can also include an ion imaging system (122, 124, 128) within a second pressure envelope (120) at a second pressure. The second pressure can less than or equal to the first pressure and the pressure envelopes (102, 120) can be separated by a pressure limiting aperture (PLA) (132). The system can further include gas sources (116, 118) for introducing into the first pressure envelope (102) at least one gas, and a voltage supply (114) coupled to the nanotip (110) for generating an electric field between the nanotip (114) and the PLA (132). In the system, the electric field repels and ionizes molecules or atoms of the gas in proximity to the nanotip (110) and the ion imaging system (122, 124, 128) collects at least a portion the repelled and ionized molecules or atoms traversing the PLA (132) to image the nanotip (110).
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