发明授权
- 专利标题： System and method for processing an object
- 专利标题（中）： 用于处理对象的系统和方法
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申请号： US12268802申请日： 2008-11-11
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公开(公告)号： US07923702B2公开(公告)日： 2011-04-12
- 发明人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
- 申请人： Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss NTS GmbH
- 当前专利权人： Carl Zeiss NTS GmbH
- 当前专利权人地址： DE Oberkochen
- 代理机构： Potomac Patent Group PLLC
- 优先权： DE102007054073 20071113
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; C23C16/48 ; H01J49/00
摘要：
A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
公开/授权文献
- US20090152459A1 System and Method for Processing an Object 公开/授权日：2009-06-18
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