发明授权
- 专利标题: Field effect transistor having increased carrier mobility
- 专利标题(中): 场效应晶体管的载流子迁移率增加
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申请号: US10643461申请日: 2003-08-18
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公开(公告)号: US07923785B2公开(公告)日: 2011-04-12
- 发明人: Qi Xiang , Boon-Yong Ang , Jung-Suk Goo
- 申请人: Qi Xiang , Boon-Yong Ang , Jung-Suk Goo
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Farjami & Farjami LLP
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
According to one exemplary embodiment, a FET which is situated over a substrate, comprises a channel situated in the substrate. The FET further comprises a first gate dielectric situated over the channel, where the first gate dielectric has a first coefficient of thermal expansion. The FET further comprises a first gate electrode situated over the first gate dielectric, where the first gate electrode has a second coefficient of thermal expansion, and where the second coefficient of thermal expansion is different than the first coefficient of thermal expansion so as to cause an increase in carrier mobility in the FET. The second coefficient of thermal expansion may be greater that the first coefficient of thermal expansion, for example. The increase in carrier mobility may be caused by, for example, a tensile strain created in the channel.
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