Invention Grant
- Patent Title: Field effect transistor having increased carrier mobility
- Patent Title (中): 场效应晶体管的载流子迁移率增加
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Application No.: US10643461Application Date: 2003-08-18
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Publication No.: US07923785B2Publication Date: 2011-04-12
- Inventor: Qi Xiang , Boon-Yong Ang , Jung-Suk Goo
- Applicant: Qi Xiang , Boon-Yong Ang , Jung-Suk Goo
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Farjami & Farjami LLP
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
According to one exemplary embodiment, a FET which is situated over a substrate, comprises a channel situated in the substrate. The FET further comprises a first gate dielectric situated over the channel, where the first gate dielectric has a first coefficient of thermal expansion. The FET further comprises a first gate electrode situated over the first gate dielectric, where the first gate electrode has a second coefficient of thermal expansion, and where the second coefficient of thermal expansion is different than the first coefficient of thermal expansion so as to cause an increase in carrier mobility in the FET. The second coefficient of thermal expansion may be greater that the first coefficient of thermal expansion, for example. The increase in carrier mobility may be caused by, for example, a tensile strain created in the channel.
Public/Granted literature
- US20050040477A1 Field effect transistor having increased carrier mobility Public/Granted day:2005-02-24
Information query
IPC分类: