发明授权
US07924517B2 Spatial filter, a system and method for collecting light from an object
有权
空间滤波器,用于从物体采集光的系统和方法
- 专利标题: Spatial filter, a system and method for collecting light from an object
- 专利标题(中): 空间滤波器,用于从物体采集光的系统和方法
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申请号: US11681098申请日: 2007-03-01
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公开(公告)号: US07924517B2公开(公告)日: 2011-04-12
- 发明人: Rafi Ambar , Refael Dela-Pergola
- 申请人: Rafi Ambar , Refael Dela-Pergola
- 申请人地址: IL Rehovot
- 专利权人: Applied Materials Israel, Ltd.
- 当前专利权人: Applied Materials Israel, Ltd.
- 当前专利权人地址: IL Rehovot
- 代理机构: SNR Denton US LLP
- 主分类号: G02B5/22
- IPC分类号: G02B5/22 ; G02B7/00
摘要:
A spatial filter that includes multiple opaque regions and multiple transparent regions; wherein at least a pair of opaque regions out of the multiple opaque regions are much longer than a cross sectional dimension of a light beam that impinges onto the spatial filter; and wherein an axial distance between the pair of opaque regions alters as a function of a rotational angle of the spatial filter. A spatial filter that includes multiple opaque regions and multiple transparent regions; wherein multiple groups of transparent regions are substantially shaped as portions of different spirals; wherein the different spirals are characterized by different separation distances between successive spiral turnings.
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