Invention Grant
- Patent Title: Method of fabricating thin film transistor structure having strip-shaped silicon island
- Patent Title (中): 制造具有带状硅岛的薄膜晶体管结构的方法
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Application No.: US12371625Application Date: 2009-02-16
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Publication No.: US07927929B2Publication Date: 2011-04-19
- Inventor: Chi-Lin Chen , Yu-Cheng Chen , Hsing-Hua Wu , Po-Tsun Liu
- Applicant: Chi-Lin Chen , Yu-Cheng Chen , Hsing-Hua Wu , Po-Tsun Liu
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW95107552A 20060307
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
A method of fabricating a thin film transistor (TFT) includes first providing a strip-shaped silicon island which is a thin film region with a predetermined long side and short side. Next, the strip-shaped silicon island is subject to an ion implantation to form a first ion doping region and a second ion doping region. The first and second ion doping regions, respectively used as the source and the drain of the TFT, are located at two sides along the long side of the island and substantially perpendicular to the gate. A gate is formed over the strip-shaped silicon island and the first and second ion doping regions, wherein the gate is substantially parallel to the direction of the short side.
Public/Granted literature
- US20090142886A1 METHOD OF FABRICATING THIN FILM TRANSISTOR STRUCTURE Public/Granted day:2009-06-04
Information query
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