发明授权
- 专利标题: Magnetic lens assembly
- 专利标题(中): 磁性透镜组件
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申请号: US12181199申请日: 2008-07-28
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公开(公告)号: US07928405B2公开(公告)日: 2011-04-19
- 发明人: Pavel Adamec , Carlo Salvesen , Ivo Liska
- 申请人: Pavel Adamec , Carlo Salvesen , Ivo Liska
- 申请人地址: DE Heimstetten
- 专利权人: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 当前专利权人: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 当前专利权人地址: DE Heimstetten
- 代理机构: Patterson & Sheridan, L.L.P.
- 优先权: EP07014812 20070727
- 主分类号: H01J1/50
- IPC分类号: H01J1/50
摘要:
A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.
公开/授权文献
- US20090039280A1 MAGNETIC LENS ASSEMBLY 公开/授权日:2009-02-12
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