Invention Grant
- Patent Title: Optical device having strained buried channel
- Patent Title (中): 具有应变埋入通道的光学器件
-
Application No.: US12441381Application Date: 2007-08-17
-
Publication No.: US07928442B2Publication Date: 2011-04-19
- Inventor: Bongki Mheen , Jeong-Woo Park , Hyun-Soo Kim , Gyungock Kim
- Applicant: Bongki Mheen , Jeong-Woo Park , Hyun-Soo Kim , Gyungock Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2006-0102036 20061019
- International Application: PCT/KR2007/003936 WO 20070817
- International Announcement: WO2008/048002 WO 20080424
- Main IPC: H01L31/036
- IPC: H01L31/036

Abstract:
Provided is an optical device having a strained buried channel area. The optical device includes: a semiconductor substrate of a first conductive type; a gate insulating layer formed on the semiconductor substrate; a gate of a second conductive type opposite to the first conductive type, formed on the gate insulating layer; a high density dopant diffusion area formed in the semiconductor substrate under the gate and doped with a first conductive type dopant having a higher density than the semiconductor substrate; a strained buried channel area formed of a semiconductor material having a different lattice parameter from a material of which the semiconductor substrate is formed and extending between the gate insulating layer and the semiconductor substrate to contact the high density dopant diffusion area; and a semiconductor cap layer formed between the gate insulating layer and the strained buried channel area.
Public/Granted literature
- US20090261383A1 OPTICAL DEVICE HAVING STRAINED BURIED CHANNEL Public/Granted day:2009-10-22
Information query
IPC分类: