Invention Grant
- Patent Title: Protection against charging damage in hybrid orientation transistors
- Patent Title (中): 在混合取向晶体管中防止充电损坏
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Application No.: US12317310Application Date: 2008-12-22
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Publication No.: US07928513B2Publication Date: 2011-04-19
- Inventor: Terence B. Hook , Anda C. Mocuta , Jeffrey W. Sleight , Anthony K. Stamper
- Applicant: Terence B. Hook , Anda C. Mocuta , Jeffrey W. Sleight , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent H. Daniel Schnurmann; Katherine S. Brown; Daryl K. Neff
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
A chip can include a CMOS structure having a bulk device disposed in a first region of a semiconductor substrate in conductive communication with an underlying bulk region of the substrate, the first region and the bulk region having a first crystal orientation. An SOI device is disposed in a semiconductor-on-insulator (“SOI”) layer separated from the bulk region of the substrate by a buried dielectric layer, the SOI layer having a different crystal orientation from the first crystal orientation. In one example, the bulk device includes a p-type field effect transistor (“PFET”) and the SOI device includes an n-type field effect transistor (“NFET”) device. Alternatively, the bulk device can include an NFET and the SOI device can include a PFET. When the SOI device has a gate conductor in conductive communication with a gate conductor of the bulk device, charging damage can occur to the SOI device, except for the presence of diodes in reverse-biased conductive communication with the bulk region. The diodes are operable to conduct a discharge current to the bulk region when either a voltage on the gate conductor or a voltage on the source or drain region of the SOI device exceeds a diode's breakdown voltage.
Public/Granted literature
- US20090179269A1 Protection against charging damage in hybrid orientation transistors Public/Granted day:2009-07-16
Information query
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