发明授权
- 专利标题： Micro-fluidic structure
- 专利标题（中）： 微流体结构
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申请号： US12686199申请日： 2010-01-12
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公开(公告)号： US07928520B2公开(公告)日： 2011-04-19
- 发明人: Frank Bryant , Murray Robinson
- 申请人： Frank Bryant , Murray Robinson
- 申请人地址： US TX Coppell
- 专利权人： STMicroelectronics, Inc.
- 当前专利权人： STMicroelectronics, Inc.
- 当前专利权人地址： US TX Coppell
- 代理商 David V. Carlson; Lisa K. Jorgenson
- 主分类号： H01L21/465
- IPC分类号： H01L21/465
摘要：
A microfabricated structure that includes a first layer of material on a substrate, and a second layer of material over the first layer that forms an encapsulated cavity, and a structural support layer added to the second layer. Openings can be formed in the cavity, and the cavities can be layered side by side, vertically stacked with interconnections via the openings, and a combination of both can be used to construct stacked arrays with interconnections throughout.
公开/授权文献
- US20100109100A1 MICRO-FLUIDIC STRUCTURE 公开/授权日：2010-05-06
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