Invention Grant
- Patent Title: Drive method for MEMS devices
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Application No.: US11511908Application Date: 2006-08-28
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Publication No.: US07928940B2Publication Date: 2011-04-19
- Inventor: Clarence Chui , Manish Kothari , Marc Mignard , Mithran C. Mathew , Jeffrey B. Sampsell
- Applicant: Clarence Chui , Manish Kothari , Marc Mignard , Mithran C. Mathew , Jeffrey B. Sampsell
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear, LLP
- Main IPC: G09G3/20
- IPC: G09G3/20 ; G09G3/34

Abstract:
Embodiments of exemplary MEMS interferometric modulators are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a lower electrical resistance than the row electrode. A driving circuit applies a potential difference of a first polarity across electrodes during a first phase and then quickly transition to applying a bias voltage having a polarity opposite to the first polarity during a second phase. In certain embodiments, an absolute value of the difference between the voltages applied to the row electrode is less than an absolute value of the difference between the voltages applied to the column electrode during the first and second phases.
Public/Granted literature
- US20070024550A1 Drive method for MEMS devices Public/Granted day:2007-02-01
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