发明授权
US07930943B2 Differential pressure sensor 有权
差压传感器

Differential pressure sensor
摘要:
In order to reduce hysteresis and other noise components included in the output signal characteristic of a differential pressure sensor, an elastic reaction member which operates together with a diaphragm provided in a chamber of the differential pressure sensor includes a contact portion which contacts the diaphragm, and a plurality of springs which are arranged symmetrically about the contact portion. Each of the springs is a plate shaped or linear shaped spring which is bent into the form of a letter C, U, J, or V, and has one of its ends fixed to a wall which defines the chamber, while its other end is connected to the contact portion. When the contact portion shifts together with the diaphragm, the deformations of the plurality of springs are mutually balanced, so that rotation and horizontal deviation of the contact portion with respect to the diaphragm is suppressed.
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